Semiconductor Process
Thermal Oxidation


Buysemi supply silicon wafer processed by thermal oxidation process​.



The following wafers are available for supply.


  Processable substrate size

  2~12

  Type / Dopant

  P /Boron or N /Phous , N/As , N/sb or Undopped

  Orientation

  <100> , <111> , <110>​​

  Resistance value

  Low resistance (<0.005ohm.cm ), General resistance (1-100ohm.cm),

  High resistance (>1kohm.cm)

  Thickness

  Thin (>80um), General thickness per each substrate size 

  Thick (<1,000um)

  Wafer surface condition

  Double or single side polish ​

  Grade

  Test , Prime





Thermal Oxidation process


  Method of growth

  Dry or Wet process

  Thickness of silicon oxide(SiO2)

  200A ~ Tens of um

  Uniformity

 ±3% 

  ±7% for 2" or 3" substrate 

  Processable wafer size

  2~12

  Deliverables

  Silicon oxide (SiO2) thickness test report

  Measure 5 wafers per a batch of 25 wafers, Check 5 points per a wafer.

  Delivery

  Ready for shipping within 7 days

  Package

  Class1000 , air-tight vacuum packaging

  Minimum order

  25 sheets





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Measurement of Dry Oxide AFM [RMS Roughness: 8.62Å, Ave Roughness: 6.42Å]​


Process for the wafer treated by thermal oxidation process


  Thickness control

  CMP ( Chemical Mechanical Polishing ) , Min.>80um, 2”~12” 

  When a single-sided polished silicon wafer is subjected to a CMP process after

  a thermal oxidation process, the backside is free from silicon oxide.

  TTV control of backside

  TTV (Total Thickness Variation) manufactured from general maker is <15um, 

  but can work up to ± 1um through CMP process.

  Size control

  Customize through Dicing process: 5mm*5mm, 10mm*10mm, etc.

  Metal deposition

  DC & RF Sputtering ( 2”~12”) , Evaporation ( 4”, 6” or 8”)

  Patterning process

  Dry etching, Deep Si Etching , Lift off ( 4”, 6” or 8”)





 Thin Film thickness (Å)

 Color

 Thin Film thickness ()

 Color

 1,000

 Dark violet to red violet 

 7,200

 Blue green to green (quite broad) 

 2,000

 Light gold or yellow ; slightly metallic 

 8,000

 Orange 

(rather broad for orange)

 3,000

 Blue to violet blue 

 9,200

 Blue green 

 4,100

 Light orange 

 1um

 Carnation pink 

 5,000

 Blue green 

 1.21um

 Violet red 





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