All of Wafer
Quartz wafer


Buysemi deals with quartz wafers of all specifications.


Quartz from 2 inches to 8 inches & quadrangular shapes and also semiconductor process and processing are available.



The following quartz wafers are available :


  Size

  2~8 ( 8inch : Flat , Notch )

  Material

 ​ Fused silica ( synthetic quartz )

  Thickness

  80um~Customized thickness is available but standard thickness is 0.5T.​

  Flat

 ​ Round , 1Flat , 2Flat , Notch

  Surface Finished

  single side polished, double side polished​

  Warp

  <0.1 / 100mm​

  Scratch / Dig

  60 / 40um​

  Chip

  >0.5mm : 0ea​

  Particle

  >10um@50k Lux : 0ea​

  Package

  Packing to be class 1000 cleanroom​





Quartz wafer process


  Thickness control

  CMP ( Chemical Mechanical Polishing ), minimum processable thickness>80um,

  2~12

  TTV control

  TTV (Total Thickness Variation) manufactured by general maker <10um, 

  but workable up to ±1um through CMP process.

  Size control

 ​ Customize through Dicing process: 5mm*5mm, 10mm*10mm, etc.

  SiO2 deposition process

  PECVD (2~8)

  RF Sputtering (2~12) & DC Sputtering (2~12) All kinds of metals.

  Metal deposition process

  DC& RF Sputtering (2~12) , Evaporation (4, 6, 8)

  Si3N4 deposition

  LPCVD ( 4 , 6 , 8 ) , Low Stress , Thickness : 1,000A~2um

  Patterning Process

  Dry etching , Lift off ( 4 or 6 or 8)

  Sandblaster

  Hole & Step Make ( 4 or 6 )





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